Head of the working group "Young Investigator Group Micromechanical Sensor...

BTU Cottbus-Senftenberg

Cottbus

The Chair of Micro- and Nanosystems is concerned with application-oriented research of novel actuators and sensors. These are conceived, designed and simulated. The components are then manufactured in close cooperation with the Fraunhofer IPMS in Dresden on the basis of silicon technologies. They are then characterized and evaluated for a wide range of applications at the Chair. The focus is on electrostatic/capacitive elements, such as the so-called NED actuator ("Nano Electrostatic Drive"), which is being further developed for use in micro loudspeakers, ultrasonic sensors or micropositioning systems. The work in the department also includes reliability studies and aspects of system integration as well as the use of artificial intelligence algorithms to realize innovative sensor system solutions.

In addition to the Fraunhofer IPMS, there are numerous other research and development partners working together, for example, in the BMBF-funded project "Innovation Campus Electronics and... More Detail

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